- Effects of tail states on the conduction mechanisms in silicon carbide thin films with high carbon content
- Crystalline silicon surface passivation by amorphous silicon carbide films
- Electronic properties of intrinsic and doped amorphous silicon carbide films
- Sputtered silicon carbide thin films as protective coating for MEMS applications
- Electrical characterization of amorphous silicon carbide thin films deposited via polymeric source chemical vapor deposition
- Mechanical characterization of chemical-vapor-deposited polycrystalline 3C silicon carbide thin films
- Microstructure of highly crystalline silicon carbide thin films grown by HWCVD technique
- Low temperature amorphous silicon carbide thin film formation process on aluminum surface using monomethylsilane gas and trichlorosilane gas
- Simulation of electron channelling patterns for in situ polytype analysis of silicon carbide films
- Chemically vapor-deposited silicon carbide films for surface protection