- Deposition of epitaxial silicon carbide films using high vacuum MOCVD method for MEMS applications
- Effect of substrate temperature on structure and intrinsic stress in vapor-deposited amorphous silicon carbide film
- Microstructure and electronic properties of microcrystalline silicon carbide thin films prepared by hot-wire CVD
- Effects of tail states on the conduction mechanisms in silicon carbide thin films with high carbon content
- Crystalline silicon surface passivation by amorphous silicon carbide films
- Electronic properties of intrinsic and doped amorphous silicon carbide films
- Sputtered silicon carbide thin films as protective coating for MEMS applications
- Electrical characterization of amorphous silicon carbide thin films deposited via polymeric source chemical vapor deposition
- Mechanical characterization of chemical-vapor-deposited polycrystalline 3C silicon carbide thin films
- Microstructure of highly crystalline silicon carbide thin films grown by HWCVD technique