- Fracture properties of Silicon carbide thin films characterized by bulge test of long membranes
- Amorphous silicon carbide films prepared by H2 diluted silane–methane plasma
- Peculiarities of field emission from silicon carbide films
- A novel wafer reclaim method for silicon carbide film
- Investigation and characterisation of silicon nitride and silicon carbide thin films
- Structural and electrical studies of radio frequency sputtered hydrogenated amorphous silicon carbide films
- An integrated model for halide chemical vapor deposition of silicon carbide epitaxial films
- Structural changes of hot-wire CVD silicon carbide thin films induced by gas flow rates
- Deposition of epitaxial silicon carbide films using high vacuum MOCVD method for MEMS applications
- Effect of substrate temperature on structure and intrinsic stress in vapor-deposited amorphous silicon carbide film