- Study of Boron-Doped Silicon Carbide Thin Films
- Oxidation study of plasma-enhanced chemical vapor deposited and rf sputtered hydrogenated amorphous silicon carbide films
- Fracture Properties of Silicon Carbide Thin Films by Bulge Test of Long Rectangular Membrane
- Fracture properties of Silicon carbide thin films characterized by bulge test of long membranes
- Amorphous silicon carbide films prepared by H2 diluted silane–methane plasma
- Peculiarities of field emission from silicon carbide films
- A novel wafer reclaim method for silicon carbide film
- Investigation and characterisation of silicon nitride and silicon carbide thin films
- Structural and electrical studies of radio frequency sputtered hydrogenated amorphous silicon carbide films
- An integrated model for halide chemical vapor deposition of silicon carbide epitaxial films