Company Name: Xiamen Powerway Advanced Material Co., Ltd
Tel: +86-592-5601404
Fax: +86-592-5745822
E-Mail: sic@powerwaywafer.com

Address: #3007-3008, No.89, Anling,Huli Developing Zone, Xiamen,China

6H Semi-insulating SiC

Model NO.:intanetcms000044
6H Semi-insulating SiC
FEATURE

PAM-XIAMEN offers 6H Semi-insulating silicon carbide wafers.

 

SILICON CARBIDE MATERIAL PROPERTIES
 Polytype Single Crystal 4H Single Crystal 6H
Lattice Parameters  a=3.076 Å  a=3.073 Å 
c=10.053 Å  c=15.117 Å 
Stacking Sequence  ABCB  ABCACB 
Band-gap  3.26 eV  3.03 eV 
Density  3.21 · 103 kg/m3  3.21 · 103 kg/m3 
Therm. Expansion Coefficient  4-5×10-6/K  4-5×10-6/K 
Refraction Index  no = 2.719  no = 2.707 
ne = 2.777  ne = 2.755 
Dielectric Constant  9.6 9.66
Thermal Conductivity  490 W/mK 490 W/mK
Break-Down Electrical Field  2-4 · 108 V/m 2-4 · 108 V/m
Saturation Drift Velocity  2.0 · 105 m/s 2.0 · 105 m/s
Electron Mobility  800 cm2/V·S  400 cm2/V·S 
hole Mobility  115 cm2/V·S  90 cm2/V·S 
Mohs Hardness  ~9 ~9 
6H SIC,SEMI-INSULATING , 2″WAFER SPECIFICATION
SUBSTRATE PROPERTY S6H-51-SI-PWAM-250 S6H-51-SI-PWAM-330 S6H-51-SI-PWAM-430
Description A/B Production Grade C/D Research Grade D Dummy Grade 6H SEMI Substrate
Polytype  6H 
Diameter  (50.8 ± 0.38) mm 
Thickness  (250 ± 25) μm                     (330 ± 25) μm                (430 ± 25) μm
Resistivity (RT)  >1E5 Ω·cm 
Surface Roughness  < 0.5 nm (Si-face CMP Epi-ready); <1 nm (C- face Optical polish) 
FWHM  A<30 arcsec                   B/C/D <50 arcsec  
Micropipe Density  A+≤1cm-2 A≤10cm-2   B≤30cm-2 C≤50cm-2 D≤100cm-2
Surface Orientation 
On axis  <0001>± 0.5° 
Off axis  3.5° toward <11-20>± 0.5° 
Primary flat orientation  Parallel {1-100} ± 5° 
Primary flat length  16.00 ± 1.70 mm 
Secondary flat orientation  Si-face:90° cw. from orientation flat ± 5° 
  C-face:90° ccw. from orientation flat ± 5° 
Secondary flat length  8.00 ± 1.70 mm 
Surface Finish  Single or double face polished
Packaging  Single wafer box or multi wafer box
Usable area  ≥ 90 % 
Edge exclusion  1 mm 
6H Semi-insulating SIC,5mm*5mm, 10mm*10mm WAFER SPECIFICATION : Thickness:330μm/430μm
6H Semi-insulating SIC,15mm*15mm, 20mm*20mm WAFER SPECIFICATION: Thickness:330μm/430μm
a-plane SiC Wafer, size: 40mm*10mm,30mm*10mm,20mm*10mm,10mm*10mm,specs below: 
6H Semi-insulating Thickness:330μm/430μm or custom


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