- 5.5.1 Choice of Polytype for Devices
- 5.5.2 SiC-Selective Doping: Ion Implantation
- 5.5.3 SiC Contacts and Interconnect
- 5.5.4 Patterned Etching of SiC for Device Fabrication
- 5.5.5 SiC Insulators: Thermal Oxides and MOS Technology
- 5.5.6 SiC Device Packaging and System Considerations
- 5.6 SiC Electronic Devices and Circuits
- 5.6.1 SiC Optoelectronic Devices
- 5.6.2 SiC RF Devices
- 5.6.3 SiC High-Temperature Signal-Level Devices