- 5.4 SiC Semiconductor Crystal Growth
- 5.4.1 Historical Lack of SiC Wafers
- 5.4.2 Growth of 3C-SiC on Large-Area (Silicon) Substrates
- 5.4.3 Growth of Hexagonal Polytype SiC Wafers
- 5.4.4 SiC Epilayers
- 5.4.4.1 SiC Epitaxial Growth Processes
- 5.4.4.2 SiC Epitaxial Growth Polytype Control
- 5.4.4.3 SiC Epilayer Doping
- 5.4.5 SiC Crystal Dislocation Defects
- 5.5 SiC Device Fundamentals