2-19.Scratches
2-19.Scratches
A scratch is dened as a singular cut or groove into the frontside wafer surface with a length-to-width ratio of
greater than 5 to 1, and visible under hight intensity illumination.
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2-19.Scratches
A scratch is dened as a singular cut or groove into the frontside wafer surface with a length-to-width ratio of
greater than 5 to 1, and visible under hight intensity illumination.